Heliotis 3D 白光干涉掃描儀
heliInspect™H8
heliInspect™H8 3D 面型白光干涉儀量測
擴展的測量能力
- 具有可靠的亞微米分辨率的面型測量
- 基於最新的3D sensor heliSens™S4H
- 無與倫比的測量速度和分辨率
- 高動態範圍可實現強大的測量
- 從2倍放大到100倍
輕鬆集成到生產線
- 標準GenICam接口
- 標準例程已在相機上實現
- 集成Z掃描儀，行程40 mm，兩種分辨率1/20 nm
- 多種安裝配置
軟體
- 與支持GenICam的標準應用程序兼容
- heliSDK™，有Halcon，C ++，LabVIEW，Python的示例
應用
| Measurement principle | White-Light Interferometer (industrial grade WLI) |
| Sensor | Heliotis lock-in imager heliSens™ S4 with in-pixel signal processing |
| Camera board | FPGA based high-speed board, SOC, Linux OS, high-level interface through embedded heliService™ |
| Light source | High-power LED, 630 nm |
| Scanner | Linear motor, precision guides, stroke = 40 mm, standard resolution = 20 nm, ultra resolution = 1 nm |
| Interfaces | GenCam / GigE, GIO, power (24V) |
| Software | heliSDK™ with examples for Halcon, LabVIEW, C++, Python |
| heliOptics™ WLI8 | 2 x | 4 x | 8 x | 10 x | 20 x | 50 x | 100 x |
| Field of view [mm2] | 6.5x 6.1 | 3.3x 3.1 | 1.6x 1.5 | 1.3x 1.2 | 0.65x 0. 61 | 0. 26x 0.25 | 0.13x 0.12 |
| Optical resolution [µm] | 12 | 6 | 3 | 2.4 | 1.2 | 0.48 | 0.24(*) |
| Working distance [mm] Nikon Mirau Leica Mirau |
43.0 | 42.9 | 12.8 | 7.4 3.6 |
4.7 3.6 |
3.4 2.5 |
2.0 n. a. |
| Numerical aperture | 0.1 | 0.15 | 0.25 | 0.3 | 0.4 | 0.5 | 0.7 |
