CHROCODILE CLS 2PRO |
探針卡檢測 | 監測晶圓彎曲度、 翹曲度和總厚度變化 |
晶圓薄化和結構化期間 的製程中厚度監測 |
切割槽檢測 | 晶粒裂痕檢測 |
Measured value | distance |
Measuring rate [lines per second] (full measuring range) |
7930 |
Measuring rate [lines per second] (reduced measuring range) |
18300 |
Measuring rate [lines per second] (high speed mode, reduced measuring range) |
36000 |
Number of points / line | 1200 |
Synchronization with external devices | trigger input, synchronizing output, 5 encoder inputs |
Interface | Ethernet, RS-422 |
Light source | Laser Diode |
Operating temperature | +5°C up to +35°C |
Dimension (w x h x d) | 346 mm x 185 mm x 135 mm |
Weight | 6.2 kg |
Supply voltage | 24 V DC ± 10% |
Rated power | < 50 W |