heliInspect™ H9 – Industrial WLI
Large measuring fields
Long working distances
Easy integration into the line
Software
Applications
H9 L | ||||
Measurement principle | White-Light Interferometer (industrial grade WLI) | |||
Magnification | 2x | 1x | 0.8x | 0.5x |
Field of View[mm x mm] | 6.14 x6.53 | 12.29 x13.06 | 15.36 x16.32 | 24.58 x26.11 |
Lateral Resolution [um] | 12 | 24 | 30 | 48 |
Working Distance [mm] | 110 | 113 | 113 | 113 |
Numerical Aperture | 0.11 | 0.067 | 0.053 | 0.033 |
H9 S | ||||||
Measurement principle | White-Light Interferometer (industrial grade WLI) | |||||
Magnification | 3x | 2x | 1.5x | 1x | 0.8x | 0.5x |
Field of View[mm x mm] | 4.10 x 4.35 | 6.14 x6.53 | 8.19 x8.70 | 12.29 x13.06 | 15.36 x16.32 | 24.58 x26.11 |
Lateral Resolution [um] | 8 | 12 | 16 | 24 | 30 | 48 |
Working Distance [mm] | 49 | 49 | 51 | 51 | 51 | 51 |
Numerical Aperture | 0.15 | 0.13 | 0.10 | 0.067 | 0.053 | 0.033 |