heliInspect™H8

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Heliotis 3D Industrial Camera

heliInspect™H8

heliInspect™ H8 – Industrial WLI

Enhanced measurement capability

  • topology measurement with reliable sub-micrometer resolution
  • based on the latest 3D pixel sensor heliSens™ S4H
  • unsurpassed measurement speed and resolution
  • robust measurements thanks to high dynamic range
  • Magnifications from 2x to 100x
 

Easy integration into the line

  • standard GenICam Interface
  • standard routines are already implemented on the camera
  • integrated Z-scanner with 40 mm stroke, two resolutions 1 / 20 nm
  • multiple configurations for cables and fastening
 

Software

  • compatible with standard applications supporting GenICam
  • heliSDK™ with examples for Halcon, C++, LabVIEW, Python

 

Application

 

Planarity

 

 

Geometry

 

 

Defect

 

 

Roughness

 

heliInspect™H8

 

 Measurement principle  White-Light Interferometer (industrial grade WLI)
 Sensor  Heliotis lock-in imager heliSens™ S4 with in-pixel signal processing
 Camera board  FPGA based high-speed board, SOC, Linux OS,
 high-level interface through embedded heliService™
 Light source  High-power LED, 630 nm
 Scanner  Linear motor, precision guides, stroke = 40 mm,
 standard resolution = 20 nm, ultra resolution = 1 nm
 Interfaces  GenCam / GigE, GIO, power (24V)
 Software  heliSDK™ with examples for Halcon, LabVIEW, C++, Python

 

 

 

heliOptics™ WLI8 2 x 4 x 8 x 10 x 20 x 50 x 100 x
Field of view [mm2] 6.5x 6.1 3.3x 3.1 1.6x 1.5 1.3x 1.2 0.65x 0. 61 0. 26x 0.25 0.13x 0.12
Optical resolution [µm] 12 6 3 2.4 1.2 0.48 0.24(*)
Working distance [mm]
Nikon Mirau
Leica Mirau
43.0 42.9 12.8 7.4
3.6
4.7
3.6
3.4
2.5
2.0
n. a.
Numerical aperture 0.1 0.15 0.25 0.3 0.4 0.5 0.7