heliInspect™ H8 – Industrial WLI
Enhanced measurement capability
Easy integration into the line
Software
Application
Measurement principle | White-Light Interferometer (industrial grade WLI) |
Sensor | Heliotis lock-in imager heliSens™ S4 with in-pixel signal processing |
Camera board | FPGA based high-speed board, SOC, Linux OS, high-level interface through embedded heliService™ |
Light source | High-power LED, 630 nm |
Scanner | Linear motor, precision guides, stroke = 40 mm, standard resolution = 20 nm, ultra resolution = 1 nm |
Interfaces | GenCam / GigE, GIO, power (24V) |
Software | heliSDK™ with examples for Halcon, LabVIEW, C++, Python |
heliOptics™ WLI8 | 2 x | 4 x | 8 x | 10 x | 20 x | 50 x | 100 x |
Field of view [mm2] | 6.5x 6.1 | 3.3x 3.1 | 1.6x 1.5 | 1.3x 1.2 | 0.65x 0. 61 | 0. 26x 0.25 | 0.13x 0.12 |
Optical resolution [µm] | 12 | 6 | 3 | 2.4 | 1.2 | 0.48 | 0.24(*) |
Working distance [mm] Nikon Mirau Leica Mirau |
43.0 | 42.9 | 12.8 | 7.4 3.6 |
4.7 3.6 |
3.4 2.5 |
2.0 n. a. |
Numerical aperture | 0.1 | 0.15 | 0.25 | 0.3 | 0.4 | 0.5 | 0.7 |