heliInspectTM H3 - 3D Measurement Head

Metrology in Three Dimensions for Surfaces and Volumes

The new heliInspect™ H3 brings superior 3D metrology to the production floor. Equipped with heliotis’ latest 3D sensor heliSenseTM S3, this compact measurement module provides sub-micrometer surface analysis as well as true tomographic volume data.

The instrument utilizes heliotis’ proven parallel Optical Coherence Tomogra-phy principle and offers unmatched scan rates. Fast acquisition rates and a special design of the interferometer render vibration isolation obsolete.

The 3D vision module is engineered for high throughput and rough environ-ments. It is manufactured in Switzerland for long lasting reliability.

Applications

• surface roughness
• geometrical feature control
• in-line quality inspection
• lab automation
• OEM integration
• statistical process control

Features

• surface topography
• volume tomography
• robust and fast
• sub-um resolution
• measures any surface
• small form factor
• modular system of linear motors (portal robot)
• software development kit for rapid integration (Windows, Mac, Linux)