Heliotis 3D Industrial Camera
HeliInspect H4
heliInspectTM H4 - 3D Measurement Head
Equipped with the high-speed 3D imager heliSense™ S3 this brand new measurement module combines sub-micrometer surface metrology with large field of views. The heliInspect™ H4 operates as a non-contact white light interferometer (WLI) on almost any surface, including glass and metal.
The H4 is engineered for in-line applications requiring high throughput and robustness. Customized modules are available for equipment manufactur-ers. As all Heliotis products, the module is manufactured in Switzerland for long lasting reliability.Applications
- co-planarity measurements
- geometrical feature control
- OEM integration
- in-line quality inspection
- statistical process control
Features
- surface topography
- volume tomography
- robust and fast
- sub-um resolution
- measures any surface
- software modules for rapid integration (Windows, Mac, Linux)
Applications
| 3D sensor | patented smart pixel sensor heliSense™ S3 with in-pixel signal processing of up to 1 million 2D-slices per second |
| 2D mode | live-view for navigation on sample (optional) |
| Light source | standard: red power LED options: Superluminescent Light Emitting Diode (center = 840 nm, Poptical = 8 mW) |
| Field of view | 11.12 x 11.6 mm (standard configuration) |
| Numerical aperture | 0.1 (standard configuration) |
| Working distance | 16 mm (standard configuration) |
| Vertical resolution | 100 nm standard, 20 nm in phase mode |
| Vertical scan speed | up to 50 mm per second |
| Lateral resolution | 40 μm (standard configuration) |
| Reflectivity of sample | < 0.1% to 100% |
.jpg)