heliOpticsTM WLI5 - Compact Mirau-Interferometer Module

Based on the highest resolution 3D-measurement technique of white-light interferometry, the WLI5 optics module offers unprecedented flexibility for integration with your metrology system. Its compact dimensions, small weight, and robust optical design enable a variety of interferometer config-urations and allow for use of small and cost effective linear motors.

With a vertical resolution down to nanometers and lateral resolutions down to 0.8 micrometer, the WLI5 is particularly suited for high-precision surface characterization and for measuring geometrical features such as step heights, co-planarity or flatness with extreme accuracy.

In combination with Heliotis’ smart pixel 3D-camera heliCam™ C3, as well as a range of interchangeable lenses, turn-key 3D-metrology is available in custom-tailored configurations and application specific lateral magnifica-tions. As the fastest scanning white-light interferometer, the WLI5/C3 configu-ration is ideally suited for integration into machines that inspect electronic components and packages, micro-mechanics, MEMS, micro-optics or sem-iconductors.

Features

• surface topography down to nanometers
• measures any surface
• designed for inspection machines
• fast and vibration resistant
• multiple field of views / lateral resolutions
• software modules for rapid integration (Windows, Mac, Linux)