Heliotis 3D Industrial Camera
heliInspect™H9/H9M
heliInspect™H9/9M Large FOV Industrial WLI
For applications where conventional sensors reach their limits, the heliInspect™ H9 and H9M excel with true sub-micrometer height resolution. The unmatched performance of these industry grade White-Light-Interferom-eters are based on Heliotis next generation 3D-pixel sensor heliSens™ S4 and S4M.
Measurement capability extended
- Height measurements with true sub-micrometer accuracy
- Unprecedented measurement speed
- Higher resolution in x, y at given FOV
- Highest intra-scene dynamic range
- Large set of optical magnifications
Integration as easy as a 2D camera
- Standard GenCAM interface
- On-camera services for standard tasks
Software
- compatible with standard applications supporting GenICam
- heliSDK™ with examples for Halcon, C++, LabVIEW, Python
Applications
| Measurement principle | White-Light Interferometer (industrial grade WLI) |
| Sensor | Heliotis lock-in imager heliSens™ S4/S4M, in-pixel signal processing |
| Camera board | FPGA based high-speed board, SOC, Linux OS, high-level interface through embedded heliService™ |
| Light source | High-power LED, λc = 630 nm |
| Scanner | Linear motor, precision guides, stroke = 40 mm or 80 mm, standard resolution = 100 nm |
| Interfaces | GenCam / GigE, GIO, power (24V) |
| Software | heliSDK™ for C++, C#, Halcon, Matrox, LabVIEW, Python |
| Configuration | 3 x | 2 x | 1.5 x | 1 x | 0.8 x | 0.5 x | |
| Field of view [mm2] | 4.10 x4.35 | 6.14 x6.53 | 8.19 x8.70 | 12.29 x13.06 | 15.36 x16.32 | 24.58 x26.11 | |
| Optical resolution [µm] | H9 | 8 | 12 | 16 | 24 | 30 | 48 |
| H9M | 4 | 6 | 8 | 12 | 15 | 24 | |
| Working distance [mm] | Standard | 49 | 49 | 51 | 51 | 51 | 51 |
| Long WD | n.a. | n.a. | n.a. | 113 | 113 | 113 | |
| Numerical aperture | Standard | 0.15 | 0.13 | 0.10 | 0.067 | 0.053 | 0.033 |
| Long WD | n.a. | 0.11 | n.a. | 0.067 | 0.053 | 0.033 | |
